Brooks Instrument

Durchflussmesser SLA SLA Family of MFCs, MFMs, PCs and RTs ConfModelCode SLA5850S1TAB1B2A1 CUST P/N LineDescription SLA5850 N2 25 NLPM LineComments REF P/N SPECIAL Base Model SLA5850 REV B Max Press 1500 psig [103 BAR] Max Temperature 149F [65C] Temperature 20C Meter Material 316L SS Valve Type NC Valve Viton Seat O-Ring Viton Elect Conn 15-pin D-Conn Proc Anschl Sz 1/4-in Conn Type BSP Fs Flow Rate 25 NLPM Gas N2 Inl Pressure 6 barg Out Pressure barg 5 Cal Ref Temp 0C Input Signal 0-5V Output Sig 0-5V Comm Smart Emulation Baudrate 19200 OutputEnh Std Response PwrSplyIn 24 Vdc Cert Safe Area Mtg Att [1] Horizontal base down Calibration [B] Single Oem Cust Standard Brooks label Orifice Size Orifice 0.048 Restrictor Type ACLFE/Wiremesh Restrictor Size code Size 4 N2 Gas E. Factor 1 N2_EQ 25 NLPM Cal Sheet Notes CRN Province N/A CAL1 CALIBRATE1 Fluid1 N2 Range1 25 Units1 NLPM InletPressure1 6 barg OutletPressure1 5 barg CalRefTemp1 0C Density1 0.0081 GM/CC SpecificHt1 1.0401 J/g K Filter None Model No Filter Additional Services: No Tag

Mass flow controller Base Model SLA5850 REV B Max Press 1500 psig [103 BAR] Max Temperature 149F [65C] Temperature 20C Meter Material 316L SS Valve Type NC Valve Seat Viton O-Ring Viton Elect Conn 15-pin D-Conn Proc Conn Sz 1/4-IN Conn Type BSP Fs Flow Rate 1000 NLPH Gas AIR Inl Pressure 7 barg Out Pressure 4.5 barg Input Signal 4-20mA Output Sig 4-20mA Comm Smart Emulation Baudrate 19200 OutputEnh Std Response PwrSplyIn 24 Vdc Cert Safe Area Mtg Att [1] Horizontal base down Calibration [B] Single Oem Cust Standard Brooks label Orifice Size 0.032 Orifice Restrictor Type ACLFE/Wiremesh Restrictor Size Size code 3 N2 E. Gas Factor 0.998 N2_EQ 16.7001 NLPM CRN Province N/A Density1 0.00952800776530197 GM/CC SpecificHt1 1.00832295960867 J/g K

Sho-Rate Glass Tube VA Flow Meter CUST P/N LineDescription 1355G Meter - C2H4 0.3 - 3 NM3/H

135XG Sho-Rate G Glass Tube Meter ConfModelCode 1355GAF3EBFV5AAA CUST P/N LineDescription 1355G 150mm Scale Meter O2 0.8 - 8 NM3/H LineComments REF P/N Base Model 1355G Meter Phase Gas Max Pressure 200 psig [14 bar] Max Temperature 250F [121C] End Block Material [A] 316SS Tube Size [F] R-6-15-BG Scale Type [3] Direct Read Float [E] Tantalum - Std 5% Packing/O-Ring Mat [B] Viton / Viton Fittings [F] 316SS - 1/8-in FNPT W/Locknut Valve [V] Cartridge III Valve - High Flow-[5] Outlet Valve Location [5] Outlet Accessories [A] None Options [A] None Certifications [A] None Range 0.8 - 8 NM3/H Reference Conditions 0C @ 1 atm Inscription1 NM3/H O2@20C 4.5 barg Fluid O2 Density 1.1087 S.G. Viscosity 0.0203 cP Operating Temp 20C Operating Press 4.5 barg CRN Province N/A Option-Tag N/A

Rotadurchflussmesser verstärktes T375X Metal Tube Variable Area Flow Meter ConfModelCode 3750CC0A11ALJADAA0 CUST P/N LineDescription 3750C UNKNOWN GAS 87-870 NLPH LineComments REF P/N Max Druck 1500 psig [104 bar] Max Temperature 180F [82C] Meter Accuracy 3% / 2.5 VDI Meter Material 316L SS 3.1 Conn Size 1/4" Conn Type FNPT - Integral Inlet Back Outlet Back O-Ring Viton Meter Lay Length 114.5 MM Valve No Valve w\ Plug Tube Size 0 Float Material Titanium VASE Flow Range 87-870 NLPH Inscription Direct Reading-Gas 2nd Inscr Scale Reference Conditions 0C bei 1 atm Fluid / Gas GAS UNKNOWN Density 0.09 S. G. Viscosity cP 0.012 OperTemperature 104F Oper Pressure psig 573 Elect Output MAT Transmitter - M20 x 1.5 Relay& Pwr Supply No Power Supply or Relay Agency Approval Zone 1, Flame-proof, CENELEC- ATEX Tests and Certificates None Mat Cert w 316SS\ Material Cert 3.1 Accessories Standard CRN N/A Mounting Standard Mount

Rotadurchflussmesser verstärkt, 1500 psi, 4-20 mA Ausgangssignal, ATEX EExd Zertifikat, Messbereich 1,6-16 l/h, Dichte 0,65, Viskosität 0,28 cP

Durchflussmesser

Elastomer, Digital, Gas Mass Flow / Pressure Meters & Controllers

Rotameter

Durchflussmesser

Elastomer Sealed, Digital, MultiFlo™ Gas Mass Flow Meters & Controllers CUST P/N LineDescription [GF040] Elastomer Mass Flow Controller 0008 - Air 25L REF P/N Base Model GF040 Elastomer Seal/ Low Flow (0-50 slpm) Configurability [C] Configurable Special Application [XX] Standard Valve [C] Normally Closed Gas [0008] Air Flow Rate 25 SLPM Fitting [T0] 10mm tube comp Downstream Condition [P] Positive Pressure Seals [V] Viton Connector/Commmunic ations [S4] S-Protocol RS485 (SLA) 4- 20mA IN/OUT Customer Special Request [XXXX] - No Special Request Auto Shut-Off [A] Auto Shut-Off included Auto Zero [X] Auto Zero not included Ref Temp [00C] 0'C Bin Size SA48 - Flow 15 - 30 SLPM N2 Eq. (0C) Additional Services No Tags

M30322-04 SLA5850SH1AB1C2A1 0-25 ln/min)

Rotameter. Skalenlänge von 0 bis 250/300 PSI, Vertikaler Anschluss ½ NPT

Elastomer, Digital, Gas Mass Flow / Pressure Meters & Controllers

Rotameter 100 PSIG/150F max